英语翻译
Fig.7 shows 3D images and surface roughness of the Siwafer by AFM to compare the unimplanted with implanted surface.Roughness of Si-wafer before N+ ion implantation is about 6 Å while it reduced to about 3 Å after implantation.The lowest surface roughness was obtained on the sample implanted with 1×1017 N cm−2 dose.This result means that the nitrogen ion implantation by PSII causes surface morphology change together with improvement in mechanical properties of trivalent chromium surface.
PSII：等离子体源离子注入